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BM30A2100 Microelectronics Processing Technology, 2 cr / 1.11 cu 
Code BM30A2100  Validity 01.08.2009 -
Name Microelectronics Processing Technology  Abbreviation Microelectronic 
Credits2 cr / 1.11 cu   
TypeBasic studies  
ClassCourse   
  Grading scaleStudy modules 0-5,P/F 
  Eligibility for post-graduate studiesno
    Allowed to study several timesno
Organisation LUT School of Engineering Science 

Teachers
Name
Tuure Tuuva 

Description by Study Guide
Note 

Location: Lappeenranta

 
Year 

M.Sc. (Tech.) 1

 
Period 

1-2

 
Teaching Language 

English

 
Teacher(s) in Charge 

Professor, Ph.D. Tuure Tuuva

 
Aims 

To provide the student with a basic knowledge of microelectronics processing technology and components. Oxidation, diffusion and metallization.

 
Contents 

Purification of semiconductor materials. Growth of semiconductor crystals and wafer preparation. Epitaxial layers, diffusion, ion implantation, oxidation, etching and photolithography. Semiconductor manufacturing and development.

 
Teaching Methods 

Special assignment 52 h.

 
Examination in Examination schedule (Yes/No) 

No

 
Examination in Moodle (Yes/No) 

No

 
Examination in Exam (Yes/No) 

No

 
Assessment scale and assessment methods 

0-5, seminar and/or written assignment 100 %.

 
Course Materials 

Plummer, J. D., Deal, M. D., Griffin, P. B., Silicon VLSI Technology: Fundamentals, Practice and Modeling.

 
Places for exchange-students? (Yes, number/No) 

No

 
Places for Open University Students?(Yes, number/No) 

max 5

 


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